Molecular Beam Epitaxy

No.2

Group-III source :Ga, In, Al (k-cell)
Group-V  source :As, Sb (Valved Cracker Cell)
Dopant:Si, Be
Other:N (RF-plasma), Atomic H (Cracking Cell)
 

No.3 

Group-III source:Ga x 2, In (k-cell)
Group-V source:As (Valved Cracker Cell) 
Dopant:Si, Be
Other:N (RF-plasma), Atomic H (Cracking Cell) 

Double chamber MBE



 Evaluation & Others

 PV Measurement System

 PV Measurement System 2         Contact-Type Thickness Meter



  Resistant Heat Deposition apparatus    Electron Beam Deposition apparatus

 Rapid Thermal Annealer             Photolithography      

  Elipsometer                                        Wire Bonder



 Atomic Force Microscope                     Scanning Electron Microscope

 High Resolution X-ray Diffractometer 

 Photoluminescence               Photoreflectance

 Ultrafast laser system                             Time-resolved spectroscopy